File:Wafer flats convention v2.svg

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Summary

DescriptionWafer flats convention v2.svg	Wafer flats convention, based on Image:Wafer flats convention.PNG Conventional meaning of flats in semiconductor wafers. Red denotes material that has been removed. Wafer orientation is the orientation of the crystallographic plane in which the crystal grew. Wafer type indicated the type of doping. Primary flat - indicates crystallographic planes of high symmetry (usually the {110} face). Secondary flat - it's position relative to Primary flat or it's absence is indicating the doping type and the orientation of wafer. Absence - p {111} 90° - p {100} 180° - n {100} 45° - n {111} Wafers under 200mm generally have flats indicating crystallographic planes of high symmetry (usually the {110} face) and, in old-fashined wafers (those below about 100mm diameter), the wafer's orientation and doping type. Modern wafers use a notch to convey this information, in order to waste less material. Orientation is important for wafer cleavage, and can affect other structural and electronic properties as well.
Date	29 February 2008
Source	self-made, This W3C-unspecified vector image was created with Inkscape .
Author	Twisp
Other versions	Wafer flats convention.PNG

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File history

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	Date/Time	Dimensions	User	Comment
current	21:40, 24 September 2013	150 × 150 (13 KB)	Cepheiden	fixed position of secondary flat Silicon processing for the VLSI era - Vol. 1 - Process technology; S Wolf; RN Tauber - Lattice Press; 1986; ISBN 096167237; p. 23
	00:37, 23 December 2008	150 × 150 (13 KB)	Inductiveload	Added arrow indication <110> direction and enlarged flats so they can be easily seen
	21:17, 29 February 2008	150 × 150 (9 KB)	Twisp
	21:13, 29 February 2008	150 × 150 (9 KB)	Twisp
	21:06, 29 February 2008	150 × 150 (8 KB)	Twisp
	20:59, 29 February 2008	150 × 150 (8 KB)	Twisp
	18:09, 29 February 2008	150 × 150 (9 KB)	Twisp	{{Information \|Description= Wafer flats convention, based on Image:Wafer flats convention.PNG Conventional meaning of ''flats'' in semiconductor wafers. Black denotes material that has been removed. Wafer orientation is